Inductively Coupled Plasma Reactive Ion Etching of GaN Films Maintaining Surface Flatness for Surface Activated Bonding

講演情報

LEDIA2020

Short Oral Presentaion

2020年4月22日(水) 11:00 〜 12:21 411+412 (Conference Center)

Session Chair: Hisashi Murakami(Tokyo University of Agriculture and Technology)

11:30 〜 11:33

*Naoki Yokoyama¹, Ryo Tanabe¹, Takaya Morikawa¹, Yasufumi Fujiwara¹, Masahiro Uemukai¹, Tomoyuki Tanikawa¹, Ryuji Katayama¹ (1. Osaka University)