スケジュール 0 11:51 〜 11:54 [LEDIA6-18] Structural analyses of a-In2O3 grown on a-Al2O3 substrates by Mist CVD *Yuka Hayakawa1, Soichiro Ohno1, Tomohiro Yamaguchi1, Takanori Kiguchi2, Hirokazu Yokoo1, Takeyoshi Onuma1, Tohru Honda1 (1. Kogakuin University, 2. Institute for Materials Research, Tohoku University, )