Characterization

[LEDIA9-04] Theoretical model for oxygen incorporation during step flow growth of GaN on vicinal m-GaN by MOVPE

*Daichi Yosho¹, Fumiya Shintaku¹, Yoshihiro Kangawa^1,2,3, Jun-Ichi Iwata⁴, Atsushi Oshiyama³, Kenji Shiraishi³, Atsushi Tanaka³, Hiroshi Amano³ (1. Kyushu University, 2. RIAM, Kyushu University, 3. IMaSS, Nagoya University, 4. AdvanceSoft Corporation)