Session 3

[OPTM3-02] Design of SiN waveguide reference wave source for point diffraction interferometer

*Yuankai Chen¹, Yongying Yang¹, Chen Wang¹, Yao Li¹, Zijian Liang¹, Hongyang Zhao¹, Shengan Liu¹, Jian Bai¹ (1. Zhejiang University)