Optical frequency combs / Frequency stabilized lasers and applications (6)

[ALPS23-02] Dispersive interference ellipsometry with line-field configuration

*Jinxu Zhang¹, Liheng Shi¹, Lizong Dong¹, Guanhao Wu¹ (1. Tsinghua University)

We demonstrate a line-field dispersive interference ellipsometry utilizing an anisotropic crystal, measuring the birefringent phase of a quarter-wave plate and SiO₂ film thickness. This method achieves line-field distribution within just 5 ms.