Novel optical materials/structure and applications (2)

[ALPS7-05] 3D Micro-Raman Tomographic Measurement on Subsurface of Magnesium Silicide Wafer

Kazuma Watanabe¹, *Teppei Onuki¹, Hirotaka Ojima¹, Jun Shimizu¹, Libo Zhou¹, Haruhiko Udono¹ (1. Ibaraki University)

Mg₂Si, are expected to be applied to infrared photosensors and thermo-photovoltaic cells. Microscopic and tomographic observation was conducted on subsurface of magnesium silicide wafer using confocal Raman microscope to evaluate machined surface quality.