ALPS Poster Session 1

[ALPSp1-03] Wavefront collection system for high-aspect-ratio nanometer hole drilling

Kanki Yoshida², *Kyosuke Soma², Yurina Michine^1,2, Hitoki Yoneda^1,2 (1. Institute for Laser Science, 2. University of Electro-Communications)

It is effective to create very high aspect ratio nanometer hole with ultra-short pulse laser. By using careful tuning of wavefront in time and space, we achieve over 100micron depth hole of 180nm hole diameter with two micro Joule pulse energy.