ALPS Poster Session 2

[ALPSp2-09] Optical and Thermo-Mechanical Properties of Vanadium Dioxide Thin Films with Different Tungsten Doped Contents

*Chuen-Lin Tien¹, Min-Yang Lu¹, Chun-Yu Chiang¹ (1. Feng Chia University)

Tungsten-doped vanadium dioxide thin films were deposited by electron beam evaporation with ion beam-assisted deposition. The optical and thermo-mechanical properties of VO₂ films were investigated. The results show the CTE and biaxial modulus are obtained.