OPTICS & PHOTONICS International Congress 2024

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LEDIA2024 » Poster Presentation

LEDIA Poster Session

2024年4月24日(水) 13:30 〜 15:00 Hall A (Pacifico Yokohama Exhibition Hall)

[LEDIAp-17] Homoepitaxial regrowth of AlGaN on chemically mechanically polished AlGaN templates and its application to UV B laser diodes

*R. Yamada1, R. Kondo1, T. Nishibayashi1, Y. Imoto1, T. Saito1, S. Maruyama1, R. Miyake1, Y. Sasaki1, S. Iwayama1, M. Iwaya1, T. Takeuchi1, S. Kamiyama1, H. Miyake2 (1. Meijo Univ., 2. Mie Univ.)

A chemically mechanically polishing of AlGaN was investigated. AlGaN was re grown on the polished templates and applied to UV B laser diodes. This method had a clear effect of reducing hillock and successfully achieved oscillation at RT

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