Ultrashort Pulsed Laser Processing

[SLPC3-05] Ultrafast laser cleaving of ultra-thin glass and polymers

*Bogusz Stępak¹, Natalia Grudzień¹, Rafał Smolin¹, Yuriy Stepanenko¹, Michał Nejbauer¹ (1. Fluence)

We present a new regime for UTG cleaving, providing an excellent edge quality compared to the process based on micro-crack generation. We also show hybrid polymer-glass and pure polymer separation using femtosecond pulses and non-diffracting beam. The influence of laser parameters on edge surface roughness is discussed.