Optics + Company

[XOPT4-05] Unlocking New Horizons in Xray Optics with High Aspect Ratio Structures

*Adam Kubec¹, Jan Erjawetz¹, Ethouba Al-Jassin¹, Florian Sander¹, Damien Eschimese¹, Florian Döring¹ (1. XRnanotech GmbH)

We explore novel deep-etched Silicon applications which can be used for X-ray with aspect ratios well above 200 with smallest feature sizes below 100 nm.This technology will impact manufacturing of refractive lenses, diffractive optics resolution test target and resolution test targets and will open a new avenue for a various applications.