Design and matching of tailored voltage waveforms on plasma process.

Presentation information

Poster Presentation

Tue. Nov 21, 2017 1:30 PM - 3:30 PM Poster (1F Exhibition Hall)

1:30 PM - 3:30 PM

*Kenji Yamaki¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Naho Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1. kyushu univ. isee)

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