Plasma Conference 2017

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Poster Presentation

[21P] Poster 1

Tue. Nov 21, 2017 1:30 PM - 3:30 PM Poster (1F Exhibition Hall)

1:30 PM - 3:30 PM

[21P-132] Spectroscopic Investigation of Water Plasma Ashing Process for Various Polymer Film

*Taishin Shimada1, Hiroaki Suzuki1, Tatsuo Ishijima1, Yasunori Tanaka1, Yoshihiko Uesugi1, Kazuma Takamori2, Takashi Nishiyama2, Hideo Horibe2 (1. Kanazawa Univ., 2. Osaka City Univ.)

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