Influence on discharge properties with the reactive gas in the DLC film formation using the HiPIMS method

Presentation information

Poster Presentation

Fri. Nov 24, 2017 2:00 PM - 4:00 PM Poster (1F Exhibition Hall)

2:00 PM - 4:00 PM

*Masahide Kuroiwa¹, Tadayuki Okano¹, Tatsuyuki Nakatani², Hiroyuki Fukue² (1. Tokyo Electronics Co., Ltd., 2. Okayama Univ. of Science)

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