SISPAD2023

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Oral

[Session 5] Interface and Reliability/Variability

Thu. Sep 28, 2023 9:00 AM - 11:30 AM Hall A

Chair: Hiu-Yung Wong (San Jose State Univ.), Nobuhiko Nakano (Keio Univ.)

10:30 AM - 10:50 AM

[Session_5-04] Theoretical Limit of TiSi2 Contact Resistance

*Min Yong Jeong1, Mohammad Ali Pourghaderi1, Kantawong Vuttivorakulchai1, Seunghyun Song1, Yoon-Suk Kim1, Márton Vörös2, Seonghoon Jin2, Byounghak Lee2, Woosung Choi2, Uihui Kwon1, Dae Sin Kim1 (1. Samsung Electronics Co., Ltd., 2. Device Laboratory Samsung Semiconductor Inc.)

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