2023 International Conference on Solid State Devices and Materials

講演情報

印刷

Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[E-8] Group IV cyrstal growth and applications

2023年9月8日(金) 15:30 〜 16:15 Room E (223, Bldg. 2)

Session Chairs: Kenta Moto (Kyushu Univ.), Toshiya Murakami (KIOXIA)

15:45 〜 16:00

[E-8-02] Exploration of Underlayers for Improving Crystal and Electrical Properties of Polycrystalline Ge Thin Films

○Kota Igura1, Shintaro Maeda1, Takamitsu Ishiyama1, Takashi Suemasu1, Kaoru Toko1 (1. Univ. of Tsukuba (Japan))

https://doi.org/10.7567/SSDM.2023.E-8-02

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