2023 International Conference on Solid State Devices and Materials

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Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[M-7] Advanced Materials, Nanofabrication, and Thin Films III

Fri. Sep 8, 2023 1:30 PM - 3:15 PM Room M (431, Bldg. 4)

Session Chairs: Akihiko Kikuchi (Sophia Univ.), Kentaro Watanabe (Shinshu Univ.)

2:15 PM - 2:30 PM

[M-7-04] Enhancement of the Polarization Properties in Thin Ferroelectric Hf 0.5Zr 0.5O 2 Films by Two-Step Flash Lamp Annealing

○Hideaki Tanimura1, Yuto Ota2, Hikaru Kawarazaki1, Shinichi Kato1, Takumi Mikawa1, Yasuo Nara2 (1. SCREEN Semiconductor Solutions Co., Ltd. (Japan), 2. Univ. of Hyogo (Japan))

https://doi.org/10.7567/SSDM.2023.M-7-04

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