2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

2023年9月7日(木) 13:30 〜 14:00 Room F (224, Bldg. 2)

Session Chairs: Hidetoshi Oishi (Sony Semiconductor Solutions Corp.), Keisuke Yamamoto (Kyushu Univ)

13:40 〜 13:42

[SO-PS-01-06] Investigation of SiGe/Si Super Lattice GAAFET and CMOS Inverter

○Heng- Jia Chang1, Yi-Ju Yao2, Ching-Ru Yang1, Ting-Yu Tseng1, Tsai-Jung Lin2, Guang-Li Luo3, Fu-Ju Hou3, Yung-Chun Wu1 (1. Department of Engineering and System Science, National Tsing Hua University (Taiwan), 2. College of Semiconductor Research, National Tsing Hua University (Taiwan), 3. Taiwan Semiconductor Research Institute (Taiwan))

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