6:10 PM - 6:30 PM
[FMC7/AIS9-4] High Resolution Array Tester for Flat Panel Display Using Proximity Capacitance Image Sensor
Array Tester, Defect Inspection, LCD, AMOLED, Proximity Capacitance Image Sensor
An array tester technology using a proximity capacitance image sensor with high resolution and high speed performance identifying electrically positions and types of defects on flat panel substrates are discussed. Some results of defects on lines and pixel-electrodes on LCD and Mini-LED panels using the array tester are demonstrated.