15:20 〜 15:40
[INP5-1(Invited)] Sub-aF Detection Accuracy CMOS Proximity Capacitance Image Sensors for Inspection, Authentification and More
Proximity capacitance, Image sensor, Noise reduction, Inspection, Authentification
This paper presents CMOS proximity capacitance image sensors achieving 0.1aF detection accuracy with high spatial resolution with real-time imaging capability and the applications thereof. Key technologies related to imaging apparatus and noise reduction, image sensor evolution in terms of pixel size shrinkage and pixel number increase, and examples of applications are to be demonstrated.