17:50 〜 18:10
[MEET8-3(Invited)] Carbon-Nanotube Based Cold Cathode Electron Beam (C-beam) for Lithography Application
Carbon Nanotube, Electron emission, Ultraviolet, Lighting
Here, ultraviolet (UV) light in various wavelength ranges was developed with a carbon nanotube (CNT)-based cold cathode electron beam (C-beam). The UV properties are related to the electron emission properties of C-beam and the wide bandgap anode materials. The generation of various UV light from UVA to UVC was confirmed. With the UV light, we applied for photo-lithography process to manufacture displays. We confirmed that...