International Display Workshops General Incorporated Association

17:50 〜 18:10

[MEET8-3(Invited)] Carbon-Nanotube Based Cold Cathode Electron Beam (C-beam) for Lithography Application

*Kyu Chang Park1、Sung Tae Yoo1 (1.Kyung Hee University (Korea))

Carbon Nanotube, Electron emission, Ultraviolet, Lighting

https://doi.org/10.36463/idw.2021.0851

Here, ultraviolet (UV) light in various wavelength ranges was developed with a carbon nanotube (CNT)-based cold cathode electron beam (C-beam). The UV properties are related to the electron emission properties of C-beam and the wide bandgap anode materials. The generation of various UV light from UVA to UVC was confirmed. With the UV light, we applied for photo-lithography process to manufacture displays. We confirmed that...