International Display Workshops General Incorporated Association

11:10 AM - 11:30 AM

[FLX5-2] Improvement of Foldable Polarizer Reliability by Optimizing TOE Process

*Bo Yuan1, Xing Yue Ma2, Ying Shen2, Qian Xiang Wang3, Yang Jiao Li1 (1. Kunshan New Flat Panel Dispaly Technology Centre Co., Ltd (China), 2. Hefei Visionox Technology Co., Ltd (China), 3. Kunshan Govisionox Optoelectronics Co., Ltd (China))

Foldable Polarizer, TOE SiNx layer, Reliability, Discoloration

https://doi.org/10.36463/idw.2023.1152

Different foldable modules were fabricated and foldable polarizer's performance was evaluated. During RA test, chemical reactions occurred between I3-/I5- ions from polarizer and NH4+ ions from touch panel on encapsulation (TOE), resulting in discoloration of the foldable polarizer. To enhance foldable polarizer's reliability, NH3: SiH4 gas flow rate was adjusted.