[A-4-1] Ionized Cluster Beam Epitaxy of Single Crystalline Aluminum Films on Semiconductors and Insulators as an Approach to New Device Structures

I. Yamada, H. Usui, H. Inokawa, T. Takagi (1.Ion Beam Engineering Experimental Laboratory, Kyoto University)

https://doi.org/10.7567/SSDM.1985.A-4-1