[C-2-6] Optical and Electrical Properties of Amorphous Silicon Nitride Films Prepared at High Deposition Rate

Y. Nishibayashi、T. Yamamoto、T. Imura、Y. Osaka、K. Shizuma、F. Nishiyama (1.Department of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1985.C-2-6