[A-4-4] SiO2 Deposition by Photo-initiation

Shigehiro Nishino、Tsunenobu Kimoto、Kohtaro Furusawa、Hiroyuki Matsunami (1.Department of Electrical Engineering, Faculty of Engineering, Kyoto University)

https://doi.org/10.7567/SSDM.1986.A-4-4