[B-5-5] High-Speed Self-Aligned Polysilicon Emitter/Base Bipolar Devices Using Boron and Arsenic Diffusion Through Polysilicon

H. Park、T. Yamaguchi、K. Boyer、G. Eiden、C. Clawson、S. Yu、J. Sachitano (1.Tektronix Laboratories, Tektronix, Inc.)

https://doi.org/10.7567/SSDM.1986.B-5-5