[A-1-1] Thermally Stable TiSi2 Thin Films by Modification in Interface and Surface Structures

A. Ohsaki, J. Komori, T. Katayama, M. Shimizu, T. Okamoto, H. Kotani, S. Nagao (1.LSI Research and Development Laboratory Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1989.A-1-1