[A-1-1] Thermally Stable TiSi2 Thin Films by Modification in Interface and Surface Structures
A. Ohsaki、J. Komori、T. Katayama、M. Shimizu、T. Okamoto、H. Kotani、S. Nagao
(1.LSI Research and Development Laboratory Mitsubishi Electric Corporation)
https://doi.org/10.7567/SSDM.1989.A-1-1