[A-2-2] Electromigration Induced Abrupt Change of Electrical Resistance in Aluminum Interconnection

Shoso Shingubara、Hisashi Kaneko、Makoto Saitoh (1.Toshiba ULSI Research Center, Toshiba R&D Center、2.Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1989.A-2-2