[A-8-3] Capacitance-Enhanced Stacked-Capacitor with Engraved Storage Electrode for Deep Submicron DRAMs

T. Mine、S. Iijima、J. Yugami、K. Ohga、T. Morimoto (1.Central Research Laboratory, Hitachi Ltd.、2.Hitachi VLSI Engineering Corp.)

https://doi.org/10.7567/SSDM.1989.A-8-3