Degradation of Sub-Threshold Characteristics in a-Si TFT with Polyimide Passivation

Tetsu OGAWA; Hirofumi WAKEMOTO; Hiroyoshi TAKEZAWA; Sadayoshi HOTTA

doi:https://doi.org/10.7567/SSDM.1990.S-E-26

[S-E-26] Degradation of Sub-Threshold Characteristics in a-Si TFT with Polyimide Passivation

Tetsu OGAWA、Hirofumi WAKEMOTO、Hiroyoshi TAKEZAWA、Sadayoshi HOTTA (1.Display Technology Research Laboratory, Matsushita Electric Industrial Co., Ltd.、2.Ishikawa-plant, Liquid Crystal Display SUM, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1990.S-E-26

1990 International Conference on Solid State Devices and Materials

[S-E-26] Degradation of Sub-Threshold Characteristics in a-Si TFT with Polyimide Passivation