Particle Counting in Semiconductor Processing Gas and Apparatus with a New Flow-Cell Type Laser Particle Counter

Kazuo ICHIJO; Kaoru KONDO; Tamio HOSHINA; Kazuo TSUBOUCHI; Kazuya MASU

doi:https://doi.org/10.7567/SSDM.1990.S-F-21

[S-F-21] Particle Counting in Semiconductor Processing Gas and Apparatus with a New Flow-Cell Type Laser Particle Counter

Kazuo ICHIJO, Kaoru KONDO, Tamio HOSHINA, Kazuo TSUBOUCHI, Kazuya MASU (1.RION CO., Ltd., 2.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1990.S-F-21

1990 International Conference on Solid State Devices and Materials

[S-F-21] Particle Counting in Semiconductor Processing Gas and Apparatus with a New Flow-Cell Type Laser Particle Counter