Particle Counting in Semiconductor Processing Gas and Apparatus with a New Flow-Cell Type Laser Particle Counter

Kazuo ICHIJO; Kaoru KONDO; Tamio HOSHINA; Kazuo TSUBOUCHI; Kazuya MASU

doi:https://doi.org/10.7567/SSDM.1990.S-F-21

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜 1990年8月24日
Hotel Sendai Plaza, Sendai, Japan

[S-F-21] Particle Counting in Semiconductor Processing Gas and Apparatus with a New Flow-Cell Type Laser Particle Counter

Kazuo ICHIJO、Kaoru KONDO、Tamio HOSHINA、Kazuo TSUBOUCHI、Kazuya MASU (1.RION CO., Ltd.、2.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1990.S-F-21

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