[D-1-2] Si Grain-Free Highly Conductive Microcrystalline SiC Films Prepared by Using Organic Silane Gas

K. Sasaki, T. Miyajima, H. Hosoya, S. Furukawa (1.Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1993.D-1-2