Bird&apos;s-Beak-Controlled Poly Buffered Locos Isolation (BPBL) Technology for 256Mb DRAM

W. S. Yang; M. U. Hwang; W. S. Paik; W. S. Lee; C. S. Choi; C. G. Hwang

doi:https://doi.org/10.7567/SSDM.1993.S-IV-15

[S-IV-15] Bird's-Beak-Controlled Poly Buffered Locos Isolation (BPBL) Technology for 256Mb DRAM

W. S. Yang、M. U. Hwang、W. S. Paik、W. S. Lee、C. S. Choi、C. G. Hwang (1.Advanced Technology Development Center, Memory Division, Semiconductor Business, SAMSUNG Electronics Co. Ltd)

https://doi.org/10.7567/SSDM.1993.S-IV-15

1993 International Conference on Solid State Devices and Materials

[S-IV-15] Bird's-Beak-Controlled Poly Buffered Locos Isolation (BPBL) Technology for 256Mb DRAM