[A-4-5] Low Temperature Impurity Diffusion in 6H-SiC: Planar Quantum-Well P-N Junctions and N-P-N Transistor Structures

N. T. Bagraev、L. E. Klyachkin、V. L. Sukhanov (1.A. F. Ioffe Physico-Technical Institute)

https://doi.org/10.7567/SSDM.1994.A-4-5