[D-3-3] Insitu Fabrication of High Quality Oxide and Poly-Si Film by Excimer Laser Irradiation

Cheol-Min Park、Juhn-Suk Yoo、Byung-Hyuk Min、Dae-Kyu Moon、Min-Koo Han (1.Room 1102, School of Electrical Engineering, Seoul National University、2.LG R&D Center)

https://doi.org/10.7567/SSDM.1996.D-3-3