[C-10-1] Highly Sensitive MOSFET Gas Sensors with Porous Platinum Gate Electrode

Hisashi Fukuda、Hiroaki Seo、Kouichirou Kasama、Toshiaki Endoh、Shigeru Nomura (1.Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology)

https://doi.org/10.7567/SSDM.1997.C-10-1