[A-10-5] Highly Efficient Gettering of Heavy Metals Using Carbon Implanted Eptaxial Si Wafers

Toshihiko Itoga、Kazuyuki Houzawa、Kazuo Takeda、Seiichi Isomae、Makoto Ohkura (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1998.A-10-5