[A-9-6] Atomic-Layer Doping in Si1-xGex/Si/Si1-xGex Heterostructures by Two-Step Solid-Phase Epitaxy

Nobuyuki Sugii、Kiyokazu Nakagawa、Shinya Yamaguchi、Masanobu Miyao (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1998.A-9-6