[B-4-1] Determination of Bandgap and Energy Band Alignment for High-Dielectric-Constant Gate Insulators Using High-Resolution X-ray Photoelectron Spectroscopy

Hiroshi Itokawa、Tetsuhiro Maruyama、Seiichi Miyazaki、Masataka Hirose (1.Department of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1999.B-4-1