The Japan Society of Applied Physics

[C-9-4] Low Voltage Operation of the Ferroelectric Pb(Zr, Ti)O3 Capacitors Derived by Sol-Gel Method

Yoshikazu Fujimori、Toshiyuki Takeda、Takashi Nakamura、Hidemi Takasu (1.Device Technology Div., Semiconductor Research and Development Headquarters, ROHM CO., LTD.)

https://doi.org/10.7567/SSDM.1999.C-9-4