[C-3-2] Hydrogen-Robust Submicron IrOx/PZT/Ir Capacitors for Embedded Ferroelectric Memory

T. Sakoda、T. S. Moise、S. R. Summerfelt、L. Colombo、G. Xing、S. R. Gilbert、A. L. S. Loke、S. Ma、R. Kavari、L. A. Wills、J. Amano (1.Texas Instruments、2.Agilent Technologies)

https://doi.org/10.7567/SSDM.2000.C-3-2