[C-4-1] SPM Studies of Hydrogen-Induced Degradation of Pt/PLZT/Pt Capacitors

Chikako Yoshida、Tetsuro Tamura、Kazuaki Kondo、Kanetake Takasaki (1.Fujitsu Limited、2.Fujitsu Laboratories Limited)

https://doi.org/10.7567/SSDM.2000.C-4-1