The Japan Society of Applied Physics

[E-8-4] A Novel Lithographic Method for Fabricating Three Dimensional Periodic Stacks

Takashi Matsuura, Kazumi Matsuda, Junichi Murota (1.Laboratory for Electronic Intelligent Systems, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.2000.E-8-4