A Novel Lithographic Method for Fabricating Three Dimensional Periodic Stacks

Takashi Matsuura; Kazumi Matsuda; Junichi Murota

doi:https://doi.org/10.7567/SSDM.2000.E-8-4

2000 International Conference on Solid State Devices and Materials

2000年8月29日〜 2000年8月31日
Sendai International Center, Sendai, Japan

[E-8-4] A Novel Lithographic Method for Fabricating Three Dimensional Periodic Stacks

Takashi Matsuura、Kazumi Matsuda、Junichi Murota (1.Laboratory for Electronic Intelligent Systems, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.2000.E-8-4

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