[B-6-5] Monolayer Nitridation of Si(001) Surfaces
Yukinori Morita、Takao Ishida、Hiroshi Tokumoto
(1.Joint Research Center for Atom Technology (JRCAT)、2.National Institute of Advanced Industrial Science and Technology (AIST))
https://doi.org/10.7567/SSDM.2001.B-6-5