[C-8-1] Novel PZT Crystallization Technique by Using Flash Lamp for FeRAM Embedded LSIs and 1Tr FeRAM Devices
Koji Yamakawa、Keitaro Imai、Osamu Arisumi、Tsunetoshi Arikado、Masaki Yoshioka、Tatsushi Owada、Katsuya Okumura
(1.Process & Manufacturing Engineering Center, Toshiba Corp., Semiconductor Company、2.Lamp Technology & Engineering Division, Ushio Inc.)
https://doi.org/10.7567/SSDM.2001.C-8-1