[P-1-13] Development of New Tight-Binding Molecular Dynamics Program to Simulate Chemical-Mechanical Polishing Processes

Toshiyuki Yokosuka、Hitoshi Kurokawa、Seiichi Takami、Momoji Kubo、Akira Miyamoto、Akira Imamura (1.Department of Materials Chemistry, Graduated School of Engineering, Tohoku University、2.Department of Mathematics, Faculty of Engineering, Hiroshima Kokusai Gakuin University)

https://doi.org/10.7567/SSDM.2001.P-1-13