Analysis of Pore Structures in Ultra Low-k Dielectrics

N. Hata; C. Negoro; K. Yamada; H. S. Zhou; Y. Oku; T. Kikkawa

doi:https://doi.org/10.7567/SSDM.2002.P4-14

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜 2002年9月19日
Nagoya Congress Center, Nagoya, Japan

[P4-14] Analysis of Pore Structures in Ultra Low-k Dielectrics

N. Hata、C. Negoro、K. Yamada、H. S. Zhou、Y. Oku、T. Kikkawa (1.MIRAI Project, ASRC, AIST、2.ASRC, AIST、3.MIRAI Project, ASET、4.Energy Electronics Institute, AIST、5.RCNS, Hiroshima Univ.)

https://doi.org/10.7567/SSDM.2002.P4-14

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